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2N Period submicron grating at the inner wall of a metal cylinder

Hirshy, Hassan, Scholz, Steffen G., Jourlin, Y., Tonchev, S., Reynaud, S., Boukenter, A. and Parriaux, O. 2014. 2N Period submicron grating at the inner wall of a metal cylinder. Microsystem Technologies 20 (10-11) , pp. 1833-1837. 10.1007/s00542-013-1949-y

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Abstract

The aim of the present contribution is to set up and demonstrate the chain of processes leading to the Ni-master of a circular cylinder having an integer number of long grating lines of submicron period at its wall. Microelectronics 2D microstructuring technologies were adapted in order to print a photoresist integer period number on a glass cylinder flank by the projection of a radial planar phase-mask grating. The next step is the galvanic growth of nickel on the photoresist corrugation. Subsequently, the manufacturing of cylindrical gratings will be enabled by an injection moulding process.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Additional Information: Online publication date: 1 November 2013.
Publisher: Springer
ISSN: 0946-7076
Last Modified: 21 Feb 2019 09:52
URI: http://orca-mwe.cf.ac.uk/id/eprint/57061

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