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High precision pressure sensors based on SAW devices in the GHz range

Rodríguez-Madrid, J.G., Iriarte, G.F., Williams, Oliver Aneurin and Calle, F. 2013. High precision pressure sensors based on SAW devices in the GHz range. Sensors and Actuators A: Physical 189 , pp. 364-369. 10.1016/j.sna.2012.09.012

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In this paper, an AlN/free-standing nanocrystalline diamond (NCD) system is proposed in order to process high frequency surface acoustic wave (SAW) resonators for sensing applications. The main problem of synthetic diamond is its high surface roughness that worsens the sputtered AlN quality and hence the device response. In order to study the feasibility of this structure, AlN films from 150 nm up to 1200 nm thick have been deposited on free-standing NCD. We have then analysed the influence of the AlN layer thickness on its crystal quality and device response. Optimized thin films of 300 nm have been used to fabricate of one-port SAW resonators operating in the 10–14 GHz frequency range. A SAW based sensor pressure with a sensibility of 0.33 MHz/bar has been fabricated.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Uncontrolled Keywords: AlN/free-standing diamond; Nucleation side; High frequency; SAW resonators; Pressure sensor
Publisher: Elsevier
ISSN: 0924-4247
Funders: EPSRC
Last Modified: 04 Jun 2017 05:36

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