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Novel process chain for fabrication of Ni shims

Velkova, Valentina, Lalev, Georgi Maximov, Hirshy, Hassan, Scholz, Steffen Gerhard and Dimov, Stefan Simeonov 2009. Novel process chain for fabrication of Ni shims. Presented at: 4M 2009: 6th International Conference on Multi-Material Micro Manufacture, Karlsruhe, Germany, 23-25 September 2009. Published in: Saile, V., Ehmann, K. and Dimov, Stefan Simeonov eds. Proceedings of 4M 2009: 6th International Conference on Multi-Material Micro Manufacture. Singapore: Research Publishing, pp. 411-414. 10.3850/4M2009RP001_9087

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This paper presents a novel process chain for fabrication of replication masters for micro injection molding, hot embossing and roll to roll imprinting. The advantages and limitations of the component technologies in the proposed process chain are analyzed and their sequence in a process chain for producing both 2.5D and 3D nano- and micro- structures is justified. In order to fabricate Ni shims incorporating different length scale features, the proposed master-making route relies on using different technologies for micro structuring and sub-micron and nano patterning in their optimal processing windows. In particular, the capabilities of photolithography as a micro structuring technology are combined with those of FIB machining to add sub-micron and nano features on micro patterned fused silica templates. Then, by applying UV nano imprinting such templates were validated and the nano and micro structures were consistently replicated in one step. Finally, the transfer of such imprints into Ni shims was also successfully accomplished with only 10% deviations from the target dimensions.

Item Type: Conference or Workshop Item (Paper)
Date Type: Publication
Status: Published
Schools: Chemistry
Subjects: Q Science > Q Science (General)
T Technology > TA Engineering (General). Civil engineering (General)
Uncontrolled Keywords: Process chain, Replication tools, FIB, NIL, Micro- and nano-manufacturing
Publisher: Research Publishing
Last Modified: 13 Apr 2019 21:16

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