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Anisotropic etching of diamond by molten Ni particles

Smirnov, W., Hees, J. J., Brink, D., Müller-Sebert, W., Kriele, A., Williams, Oliver Aneurin and Nebel, C. E. 2010. Anisotropic etching of diamond by molten Ni particles. Applied Physics Letters 97 (7) , 073117. 10.1063/1.3480602

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Nanopores in insulating solid state membranes have recently attracted much interest in the field of probing, characterizing, and manipulating single linear polymers such as DNA/RNA and proteins in their native environment. Here a low cost, fast, and effective way to produce nanostructures such as pyramidal shaped nanopores and nanochannels with dimensions down to about 15 nm in diamond membranes without any need for electron-beam lithography is demonstrated. By use of a catalytic process, anisotropic etching of diamond with self-organized Ni nanoparticles in hydrogen atmosphere at 900 °C is achieved and possible etching mechanisms are discussed. It is shown that diamond planes with the crystallographic orientation of [111] are etched slowest with this method.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Uncontrolled Keywords: DNA, electron beam lithography, etching, nanoparticles, nickel, proteins
Additional Information: 3 pages.
Publisher: American Institute of Physics
ISSN: 0003-6951
Last Modified: 04 Jun 2017 03:12

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