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Synthesis and characterization of DC magnetron sputtered nano structured molybdenum thin films

Rondiya, S. R., Rokade, A. V., Jadhavar, A. A., Pandharkar, S. M., Kulkarni, R. R., Karpe, S. D., Diwate, K. D. and Jadkar, S. R. 2016. Synthesis and characterization of DC magnetron sputtered nano structured molybdenum thin films. Presented at: 2nd International Conference on Emerging Technologies: Micro to Nano 2015 (ETMN-2015), Rajasthan, India, 24-25 October 2015. 2ND INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES: MICRO TO NANO 2015 (ETMN-2015): Contributory papers presented in 2nd International Conference on Emerging Technologies: Micro to Nano 2015. AIP Conference Proceedings AIP Publishing, 10.1063/1.4945209

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Abstract

Molybdenum (Mo) thin films were deposited on corning glass (#7059) substrates using DC magnetron sputtering system. The effect of substrate temperature on the structural, morphology and topological properties have been investigated. Films were characterized by variety of techniques such as low angle x-ray diffraction (low angle XRD), field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM). The low angle XRD analysis revealed that the synthesized Mo films are nanocrystalline having cubic crystal structure with (110) preferential orientation. The microstructure of the deposited Mo thin films observed with FE-SEM images indicated that films are homogeneous and uniform with randomly oriented leaf shape morphology. The AFM analysis shows that with increase in substrate temperature the rms roughness of Mo films increases. The obtained results suggest that the synthesized nanostructured Mo thin films have potential application as a back contact material for high efficiency solar cells like CdTe, CIGS, CZTS etc.

Item Type: Conference or Workshop Item (Paper)
Date Type: Published Online
Status: Published
Schools: Chemistry
Publisher: AIP Publishing
ISBN: 9780735413719
ISSN: 0094-243X
Last Modified: 14 Jul 2020 14:30
URI: http://orca-mwe.cf.ac.uk/id/eprint/133263

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