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Hybrid diamond/silicon suspended integrated photonic platform using SF6 isotropic etching

Panduranga, Parashara, Abdou, Aly, Richter, Jens, Thomas, Evan L. H., Mandal, Soumen, Ren, Zhong, Pedersen, Rasmus H., Williams, Oliver A., Witzens, Jeremy and Nezhad, Maziar P. 2020. Hybrid diamond/silicon suspended integrated photonic platform using SF6 isotropic etching. Presented at: 2nd IEEE British and Irish Conference on Optics and Photonics (BICOP 2019), London, England, 11-13 December 2019. 2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP). IEEE, pp. 1-4. 10.1109/BICOP48819.2019.9059586

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Abstract

A hybrid diamond/silicon air-clad ridge waveguide platform is demonstrated. The air-clad structure coupled with the wide transmission window of diamond can allow for the use of this architecture over a large wavelength range, especially for the longer infrared wavelengths. In order to provide vertical confinement, the silicon substrate was isotropically etched using S F6 plasma to create undercut diamond films. An in-depth analysis of the etch characteristics of this process was performed to highlight its potential to replace wet isotropic etching or XeF 2 isotropic vapour phase etching techniques. The performance of the waveguide at 1550 nm was measured, and yielded an average loss of 4.67 +/- 0.47 dB/mm.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Date Type: Published Online
Status: Published
Schools: Physics and Astronomy
Publisher: IEEE
ISBN: 9781728149486
Date of First Compliant Deposit: 12 May 2020
Date of Acceptance: 3 April 2020
Last Modified: 30 Jun 2020 14:53
URI: http://orca-mwe.cf.ac.uk/id/eprint/131619

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