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CPW interconnects for MMIC applications on low resistivity CMOS grade silicon using micromachined SU8 negative resist

Elgaid, Khaled, Edgar, David L., McCloy, David A. and Thayne, Iain G. 2007. CPW interconnects for MMIC applications on low resistivity CMOS grade silicon using micromachined SU8 negative resist. Presented at: 32nd European Microwave Conference 2002, Milan, Italy, 23-26 September 2002. p. 1. 10.1109/EUMA.2002.339431

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Abstract

In this work we present measured and modelled RF behaviour of a coplanar waveguide (CPW) fabricated on CMOS grade low resistivity Silicon 2ω-cm using a novel micromachined SU8 negative resist interface layer. CPW lines were designed and fabricated on the SU8 interface layer of different thickness from 25 μm to 125 μm. An attenuation of less than 0.6dB/mm at 60GHz was achieved. Physical line modelling and E-M simulations were performed to support the experimental results and to determine the SU8 dielectric parameters. Micromachining of CPW structures were also investigated where a reduction in loss by more than 30% was achieved.

Item Type: Conference or Workshop Item (Paper)
Date Type: Published Online
Status: Published
Schools: Engineering
Last Modified: 16 Mar 2020 13:00
URI: http://orca-mwe.cf.ac.uk/id/eprint/122560

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