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Fabrication of antireflection nanostructures by hybrid nano-patterning lithography

Kang, Young Hun, Oh, Sang Soon, Kim, Young-Sung and Choi, Choon-Gi 2010. Fabrication of antireflection nanostructures by hybrid nano-patterning lithography. Microelectronic Engineering 87 (2) , pp. 125-128. 10.1016/j.mee.2009.06.006

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Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Publisher: Elsevier
ISSN: 0167-9317
Date of First Compliant Deposit: 19 December 2017
Last Modified: 12 Jan 2018 11:09
URI: http://orca-mwe.cf.ac.uk/id/eprint/107670

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